气体种 |
整体尺寸 |
检测原理 |
机器型号 |
SiH 4 | 25ppm | 定电位电解式 | CDS-6-S-S |
SiH 4 | 5ppm | CDS-6-P-S | |
PH 3 | 1ppm | CDS-6-B-S | |
B 2 H 6 | 0.5ppm | CDS-6-B-S | |
AsH 3 | 0.25ppm | CDS-6-A-S | |
H 2 Se | 0.25ppm | CDS-6-HSE-S | |
Si 2 H 6 | 25ppm | CDS-6-DS-S | |
SiH 2 Cl 2 | 25ppm | CDS-6-DCS-S | |
GeH 4 | 1ppm | CDS-6-G-S | |
(CH 3 )CAsH 2 | 0.2ppm | CDS-6-TA-S | |
(CH 3 )CPH 4 | 1ppm | CDS-6-TP-S | |
NH 3 | 100ppm | CDS-6-NH-S | |
HF | 10ppm | CDS-6-HF-S | |
PF 3 | 10ppm | CDS-6-PF-S | |
HCl | 25ppm | CDS-6-HCL-S | |
HCL | 5ppm | CDS-6-HCL-L | |
HBr | 10ppm | CDS-6-HB-S | |
F 2 | 5ppm | CDS-6-F-S | |
Cl 2 | 5ppm | CDS-6-CL-S | |
ClF 3 | 1ppm | CDS-6-CLF-S | |
O 3 | 1ppm | CDS-6-OZ-S | |
CO | 250ppm | CDS-6-CO-S | |
H 2 S | 50ppm | CDS-6-HS-S | |
SO 2 | 25ppm | CDS-6-SD-S | |
NO 2 | 10ppm | CDS-6-ND-S | |
H 2 | 50ppm | 热线型半导体式 | CHS-6-F3E50 |
H 2 | 1000ppm | CHS-6-F3E70 | |
O 2 | 25% 隔膜Galvanic电池式 | COS-6-O-S | |
PS-6N,NH,ND,PBS-6N用传感器 | |||
PF 3 | 10ppm | 热分解 | CDS-6-NF-S |
CCl 4 | 25ppm | 定电位电解式 | CDS-6-CCL-S |
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